XRD and SEM Results of WO₃ Thin Films Deposited on Quartz Glasses
Sibel Morkoç Karadeniz, Ali Ercan Ekinci, Demet Tatar, Mehmet Ertuğrul

Abstract
Tungsten oxide (WO₃) films are of critical importance for electrochromic device technology, such as for smart windows capable of varying the throughput of visible light and solar energy. In this paper, the evolution of structural and morphological changes of spray-deposited WO₃ thin films was studied. WO₃ thin films were made on quartz glasses using precursor solution of Ammonium Tungstate ((NH₄)₂WO₄) by using Chemical Spray Pyrolysis Deposition Technique. The samples were annealed at 500 °C. The structural and surface properties of WO₃ thin films were studied by X-ray diffraction (XRD) and Scanning Electron Microscopy (SEM). The films (have orthorhombic crystal structure and a filamentous like network surface.

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